Numerical simulation of charging processes at ferroelectric diagnostics with scanning electron microscopy techniques

Sivunov A.V., Maslovskaya A.G.
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An algorithm of applied problem solving was described to calculate electrical characteristics of electrical field effects in ferroelectrics electron-beam charged. The algorithm was based on implementation of the deterministic model using finite element method as well as taking into account Monte-Carlo simulation results of electron transport. The program application was developed to perform computing experiments.

Keywords: mathematical model, algorithm, ferroelectric, electron irradiation, charging processes, finite element method, Monte-Carlo method
Citation in English: Sivunov A.V., Maslovskaya A.G. Numerical simulation of charging processes at ferroelectric diagnostics with scanning electron microscopy techniques // Computer Research and Modeling, 2014, vol. 6, no. 1, pp. 107-118
Citation in English: Sivunov A.V., Maslovskaya A.G. Numerical simulation of charging processes at ferroelectric diagnostics with scanning electron microscopy techniques // Computer Research and Modeling, 2014, vol. 6, no. 1, pp. 107-118
DOI: 10.20537/2076-7633-2014-6-1-107-118
URL: http://crm-en.ics.org.ru/journal/article/2120/
Creative Commons License This work is licensed under a Creative Commons Attribution-NoDerivs 3.0 Unported License.
Citations: 2 (RSCI).

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