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The purpose of this work is to develop a universal computer program (solver) which solves kinetic Boltzmann equation for simulations of rarefied gas flows in complexly shaped devices. The structure of the solver is described in details. Its efficiency is demonstrated on an example of calculations of a modern many tubes Knudsen pump. The kinetic Boltzmann equation is solved by finite-difference method on discrete grid in spatial and velocity spaces. The differential advection operator is approximated by finite difference method. The calculation of the collision integral is based on the conservative projection method.

In the developed computational program the unstructured spatial mesh is generated using GMSH and may include prisms, tetrahedrons, hexahedrons and pyramids. The mesh is denser in areas of flow with large gradients of gas parameters. A three-dimensional velocity grid consists of cubic cells of equal volume.

A huge amount of calculations requires effective parallelization of the algorithm which is implemented in the program with the use of Message Passing Interface (MPI) technology. An information transfer from one node to another is implemented as a kind of boundary condition. As a result, every MPI node contains the information about only its part of the grid.

The main result of the work is presented in the graph of pressure difference in 2 reservoirs connected by a multitube Knudsen pump from Knudsen number. This characteristic of the Knudsen pump obtained by numerical methods shows the quality of the pump. Distributions of pressure, temperature and gas concentration in a steady state inside the pump and the reservoirs are presented as well.

The correctness of the solver is checked using two special test solutions of more simple boundary problems — test with temperature distribution between 2 planes with different temperatures and test with conservation of total gas mass.

The correctness of the obtained data for multitube Knudsen pump is checked using denser spatial and velocity grids, using more collisions in collision integral per time step.

The paper simulates a mixture of gases in a multi-stage micro-pump and evaluates its effectiveness at separating the components of the mixture. A device in the form of a long channel with a series of transverse plates is considered. A temperature difference between the sides of the plates induces a radiometric gas flow within the device, and the differences in masses of the gases lead to differences in flow velocities and to the separation of the mixture. Modeling is based on the numerical solution of the Boltzmann kinetic equation, for which a splitting scheme is used, i. e., the advection equation and the relaxation problem are solved separately in alternation. The calculation of the collision integral is performed using the conservative projection method. This method ensures the strict fulfillment of the laws of conservation of mass, momentum, and energy, as well as the important asymptotic property of the equality of the integral of the Maxwell function to zero. Explicit first-order and second-order TVD-schemes are used to solve the advection equation. The calculations were performed for a neon-argon mixture using a model of solid spheres with real molecular diameters and masses. Software has been developed to allow calculations on personal computers and cluster systems. The use of parallelization leads to faster computation and constant time per iteration for devices of different sizes, enabling the modeling of large particle systems. It was found that the value of mixture separation, i. e. the ratio of densities at the ends of the device linearly depends on the number of cascades in the device, which makes it possible to estimate separation for multicascade systems, computer modeling of which is impossible. Flows and distributions of gas inside the device during its operation were analyzed. It was demonstrated that devices of this kind with a sufficiently large number of plates are suitable for the separation of gas mixtures, given that they have no moving parts and are quite simple in manufacture and less subject to wear.